Raman micro-spectroscopy as a tool to measure the absorption coefficient and the erosion rate of hydrogenated amorphous carbon films heat-treated under hydrogen bombardment

摘要

We present a fast and simple way to determine the erosion rate and absorptioncoefficient of hydrogenated amorphous carbon films exposed to a hydrogen atomicsource based on ex-situ Raman micro-spectroscopy. Results are compared toellipsometry measurement. The method is applied to films eroded at differenttemperatures. A maximum of the erosion rate is found at ~ 450 {\degree}C inagreement with previous results. This technique is suitable for futurequantitative studies on the erosion of thin carbonaceous films, especially ofinterest for plasma wall interactions occurring in thermonuclear fusiondevices.